JPH0637337Y2 - プロ−ブ装置 - Google Patents
プロ−ブ装置Info
- Publication number
- JPH0637337Y2 JPH0637337Y2 JP1986011294U JP1129486U JPH0637337Y2 JP H0637337 Y2 JPH0637337 Y2 JP H0637337Y2 JP 1986011294 U JP1986011294 U JP 1986011294U JP 1129486 U JP1129486 U JP 1129486U JP H0637337 Y2 JPH0637337 Y2 JP H0637337Y2
- Authority
- JP
- Japan
- Prior art keywords
- contact
- probe
- elastic member
- housing
- probe device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 title claims description 115
- 239000004020 conductor Substances 0.000 claims description 36
- 239000012212 insulator Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 description 21
- 230000000694 effects Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000000630 rising effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 229910001369 Brass Inorganic materials 0.000 description 3
- 239000010951 brass Substances 0.000 description 3
- 239000003550 marker Substances 0.000 description 3
- 230000005483 Hooke's law Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986011294U JPH0637337Y2 (ja) | 1986-01-29 | 1986-01-29 | プロ−ブ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986011294U JPH0637337Y2 (ja) | 1986-01-29 | 1986-01-29 | プロ−ブ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62123568U JPS62123568U (en]) | 1987-08-05 |
| JPH0637337Y2 true JPH0637337Y2 (ja) | 1994-09-28 |
Family
ID=30798376
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986011294U Expired - Lifetime JPH0637337Y2 (ja) | 1986-01-29 | 1986-01-29 | プロ−ブ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0637337Y2 (en]) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2539453B2 (ja) * | 1987-09-11 | 1996-10-02 | 株式会社日立製作所 | 半導体素子検査装置 |
| JPH07109839B2 (ja) * | 1988-12-16 | 1995-11-22 | 三洋電機株式会社 | 半導体装置の測定装置 |
| US6652326B2 (en) * | 2000-07-13 | 2003-11-25 | Rika Electronics International, Inc. | Contact apparatus particularly useful with test equipment |
| JP2012163529A (ja) * | 2011-02-09 | 2012-08-30 | Micronics Japan Co Ltd | 接触子及び検査装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5793543A (en) * | 1980-12-03 | 1982-06-10 | Nec Corp | Measuring system for semiconductor element |
| JPS5929151A (ja) * | 1982-08-09 | 1984-02-16 | 出光石油化学株式会社 | 積層フイルム |
| JPS6082271U (ja) * | 1983-11-09 | 1985-06-07 | 株式会社アドバンテスト | 同軸プロ−ブコンタクト |
| JPS60109056U (ja) * | 1983-12-28 | 1985-07-24 | 株式会社アドバンテスト | 端子接続機構 |
| JPS60166197U (ja) * | 1984-04-10 | 1985-11-05 | 日本ビクター株式会社 | シ−ルド構造 |
-
1986
- 1986-01-29 JP JP1986011294U patent/JPH0637337Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62123568U (en]) | 1987-08-05 |
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